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3M™ Diamond Pad Conditioner A166, 4.25-in dia
3M™ Diamond Pad Conditioner A166, 4.25-in dia
3M ID 7000000264 SAP ID 7000000264 Legacy SKU 60020014563 Part Number A166 Base SKU B5005035338 Keywords 3M, diamond pad conditioner, CMP pad conditioner, chemical mechanical planarization, semiconductor applications, abrasive technology, diamond retention, planarization efficiency, pad wear uniformity, corrosion resistance, customizable conditioning, 3M disks, metal contamination reduction, semiconductor industry, electronics market, longer pad life, maintenance reduction, polishing performance, wafer consistency, tungsten processes, silicon carbide processes, CMP pad usage, aggressive conditioning, pad planarity, 3M CMP pad conditioner coatings, polymer substrate, abrasive grid, CMP pad performance. Brand 3M™ Global Product Hierarchy CMP Pad Conditioners Commodity 2630 - Semiconductor Materials Base (B) - Article Number 00051111722206 Consumer (2) - Article Number 00051111722206 Marketplace Formal Name 3M™ Diamond Pad Conditioner A166, 4.25-in dia Material Description A166 Dia Pad Cond, 4.25 IN Marketplace Description 3M™ Diamond Pad Conditioner is a highly engineered chemical mechanical planarization (CMP) pad conditioner that delivers reliable performance for critical semiconductor CMP applications. It helps minimize wear and maintain consistent asperities and consistent pad performance — for wafer after wafer. CMP pad conditioners from 3M utilize sintered abrasive technology for excellent diamond retention for longer life, with controlled diamond placement and protrusion. Their single-layered diamond grid with highly controlled spacing enables you to better predict and optimize your CMP pad usage, for better planarization efficiency. Marketplace Description Extended For metal-sensitive processes, 3M™ CMP Pad Conditioner Coatings can be factory-applied to 3M™ Diamond Pad Conditioners. These micron-thin coatings are used in advanced and mature node processes sensitive to metal, or with the harsh slurries often incorporated into tungsten or silicon carbide processes. They require minimal process changes and can help reduce metal contamination by up to 99% while maintaining flatness, aggressiveness and polishing performance. Bullets - Compatible with all 3M™ CMP Pad Conditioner Coatings with minimal process changes
- Customizable for conditioning aggressiveness
- Diamonds secured with both chemical and mechanical bonds for great retention
- Exclusive polymer substrate enhances corrosion resistance
- For metal-sensitive processes, combine with 3M™ CMP Pad Conditioner Coatings
- Longer pad and disk life helps customers reduce the number of maintenance shutdowns, increasing their potential for lower cost of ownership
- Optimized for extended pad and disk life
- Tight flatness specification for 3M disks enhances pad wear uniformity and pad planarity
Abrasive Material Nickel-based Alloy with Patterned Diamond Application - Advanced Node (Memory & Logic)
- Wafer Manufacturing
- Hard Disk Drive Manufacturing
- CMP
Carrier Diameter (Imperial) 4.25 in Carrier Diameter (Metric) 107.95 mm Carrier Material 304 Stainless Steel CMP Process - Cu (Bulk)
- PMD/ILD
- STI Process
- W (Bulk)
Diamond Size 251 μm Product Series A166 Product Type Pad Conditioner ECCN EAR99 Harmonized Tariff Schedule Nbr 6805301000 Return Policy Description Special Rule: Refer to CoS Policy Sales unit EA SAP Shelf Life In Days 730 Target Warehouse Location Lead Time 43 SAP External Material Group 31191500 Base (B) - Billing Unit EA Base (B) - Customary Cubic Dimension 363.3764 IN3 Base (B) - Customary Gross Weight 1.1502 LB Base (B) - Customary Net Weight 1.00017 LB Base (B) - Customary Height Dimension 4.25 IN Base (B) - Customary Length Dimension 9 IN Base (B) - Customary Width Dimension 9.5 IN Base (B) - Metric Net Weight 0.453592 KG Base (B) - Metric Cubic Dimension 5954.649 CCM Base (B) - Metric Height Dimension 10.795 CM Base (B) - Metric Length Dimension 22.86 CM Base (B) - Metric Width Dimension 24.13 CM Base (B) - Item Quantity 1 Base (B) - Unit EA Consumer (2) - Billing Unit EA Consumer (2) - Customary Cubic Dimension 363.3764 IN3 Consumer (2) - Customary Gross Weight 1.1502 LB Consumer (2) - Customary Net Weight 1.00017 LB Consumer (2) - Customary Height Dimension 4.25 IN Consumer (2) - Customary Length Dimension 9 IN Consumer (2) - Customary Width Dimension 9.5 IN Consumer (2) - Metric Weight 0.521631 KG Consumer (2) - Metric Net Weight 0.453592 KG Consumer (2) - Metric Cubic Dimension 5954.649 CCM Consumer (2) - Metric Height Dimension 10.795 CM Consumer (2) - Metric Length Dimension 22.86 CM Consumer (2) - Metric Width Dimension 24.13 CM Consumer (2) - Item Quantity 1 Consumer (2) - Unit EA Inner (3) - Item Quantity 0 Shipper (6) - Item Quantity 0 Pallet (8) - Item Quantity 0