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3M™ Diamond Pad Conditioner L130, 4 in
3M™ Diamond Pad Conditioner L130, 4 in
3M ID 7010308000 SAP ID 7010308000 Legacy SKU 60020021899 Local Catalog Identifier L130 Base SKU B5005035338 Keywords 3M, diamond pad conditioner, CMP pad conditioner, chemical mechanical planarization, semiconductor applications, abrasive technology, diamond retention, planarization efficiency, pad wear uniformity, corrosion resistance, customizable conditioning, 3M disks, metal contamination reduction, semiconductor industry, electronics market, longer pad life, maintenance reduction, polishing performance, wafer consistency, tungsten processes, silicon carbide processes, CMP pad usage, aggressive conditioning, pad planarity, 3M CMP pad conditioner coatings, polymer substrate, abrasive grid, CMP pad performance. Brand 3M™ Global Product Hierarchy CMP Pad Conditioners Commodity 2630 - Semiconductor Materials Base (B) - Article Number 00638060824405 Consumer (2) - Article Number 00638060824405 Marketplace Formal Name 3M™ Diamond Pad Conditioner L130, 4 in Material Description L130 Dia Pad Cond, 4 IN Marketplace Description 3M™ Diamond Pad Conditioner is a highly engineered chemical mechanical planarization (CMP) pad conditioner that delivers reliable performance for critical semiconductor CMP applications. It helps minimize wear and maintain consistent asperities and consistent pad performance — for wafer after wafer. CMP pad conditioners from 3M utilize sintered abrasive technology for excellent diamond retention for longer life, with controlled diamond placement and protrusion. Their single-layered diamond grid with highly controlled spacing enables you to better predict and optimize your CMP pad usage, for better planarization efficiency. Marketplace Description Extended For metal-sensitive processes, 3M™ CMP Pad Conditioner Coatings can be factory-applied to 3M™ Diamond Pad Conditioners. These micron-thin coatings are used in advanced and mature node processes sensitive to metal, or with the harsh slurries often incorporated into tungsten or silicon carbide processes. They require minimal process changes and can help reduce metal contamination by up to 99% while maintaining flatness, aggressiveness and polishing performance. Bullets - Compatible with all 3M™ CMP Pad Conditioner Coatings with minimal process changes
- Customizable for conditioning aggressiveness
- Diamonds secured with both chemical and mechanical bonds for great retention
- Exclusive polymer substrate enhances corrosion resistance
- For metal-sensitive processes, combine with 3M™ CMP Pad Conditioner Coatings
- Longer pad and disk life helps customers reduce the number of maintenance shutdowns, increasing their potential for lower cost of ownership
- Optimized for extended pad and disk life
- Tight flatness specification for 3M disks enhances pad wear uniformity and pad planarity
Abrasive Material Nickel-based Alloy with Patterned Diamond Application - Advanced Node (Memory & Logic)
- Wafer Manufacturing
- Hard Disk Drive Manufacturing
- CMP
Carrier Diameter (Imperial) 4 in Carrier Diameter (Metric) 101.6 mm Carrier Material 410 Stainless Steel CMP Process PMD/ILD Diamond Size 251 μm Product Series L130 Product Type Pad Conditioner ECCN EAR99 Harmonized Tariff Schedule Nbr 6805301000 Return Policy Description Special Rule: Refer to CoS Policy Sales unit EA SAP Shelf Life In Days 0 Target Warehouse Location Lead Time 43 SAP External Material Group 32000000 Base (B) - Billing Unit EA Base (B) - Customary Cubic Dimension 105.08818 IN3 Base (B) - Customary Gross Weight 0.75014 LB Base (B) - Customary Net Weight 0.6002 LB Base (B) - Customary Height Dimension 1.25984 IN Base (B) - Customary Length Dimension 9.01575 IN Base (B) - Customary Width Dimension 9.25197 IN Base (B) - Metric Net Weight 0.2722 KG Base (B) - Metric Cubic Dimension 1722.08 CCM Base (B) - Metric Height Dimension 3.2 CM Base (B) - Metric Length Dimension 22.9 CM Base (B) - Metric Width Dimension 23.5 CM Base (B) - Previous Packaging Level Quantity 0.00 Base (B) - Item Quantity 1 Base (B) - Total Unit Quantity 0.00 Base (B) - Unit EA Base (B) - Pallet Layer Quantity 1.00 Base (B) - Shipping Container Per Layer Quantity 999 Consumer (2) - Billing Unit EA Consumer (2) - Customary Cubic Dimension 105.08818 IN3 Consumer (2) - Customary Gross Weight 0.75014 LB Consumer (2) - Customary Net Weight 0.6002 LB Consumer (2) - Customary Height Dimension 1.25984 IN Consumer (2) - Customary Length Dimension 9.01575 IN Consumer (2) - Customary Width Dimension 9.25197 IN Consumer (2) - Metric Weight 0.3402 KG Consumer (2) - Metric Net Weight 0.2722 KG Consumer (2) - Metric Cubic Dimension 1722.08 CCM Consumer (2) - Metric Height Dimension 3.2 CM Consumer (2) - Metric Length Dimension 22.9 CM Consumer (2) - Metric Width Dimension 23.5 CM Consumer (2) - Previous Packaging Level Quantity 1.00 Consumer (2) - Item Quantity 1 Consumer (2) - Total Unit Quantity 1.00 Consumer (2) - Item Unit EACH Consumer (2) - Unit EA Inner (3) - Item Quantity 0 Shipper (6) - Previous Packaging Level Quantity 1.00 Shipper (6) - Item Quantity 0 Shipper (6) - Total Unit Quantity 1.00 Pallet (8) - Previous Packaging Level Quantity 0.00 Pallet (8) - Previous Packaging Level Unit LOOS Pallet (8) - Item Quantity 0 Pallet (8) - Total Unit Quantity 999.00 Pallet (8) - Pallet Layer Quantity 1.00 Pallet (8) - Shipping Container Per Layer Quantity 999