Main Picture
3M™ Trizact Pad Conditioner, T102-5, 4.25 in
3M™ Trizact Pad Conditioner, T102-5, 4.25 in
3M ID 7100201564 SAP ID 7100201564 Legacy SKU 80001427139 Part Number T102-5 Local Catalog Identifier T102-5 Base SKU B5005049057 Brand Trizact™ Global Product Hierarchy CMP Pad Conditioners Commodity 2630 - Semiconductor Materials Base (B) - Article Number 00051111905234 Marketplace Formal Name 3M™ Trizact Pad Conditioner, T102-5, 4.25 in Material Description T102-5 Trizact Pad Conditioner, 4.25in Marketplace Description 3M™ Trizact™ Pad Conditioner delivers precision, consistency and reliability to semiconductor chemical mechanical polishing (CMP). The diamond-coated ceramic construction on 3M™ Trizact™ Pad Conditioner is ideal for manufacturing to micro-scale specifications, as well as exceptionally smooth pad surface finishes without tiny scratches commonly caused by diamond grit abrasives. It has a metal-free cutting surface for advanced node processes sensitive to metal contamination. It can also be combined with 3M™ CMP Pad Conditioner Coatings to help reduce metal leaching by up to an additional 99% while maintaining flatness, aggressiveness and polishing performance. Bullets - 3D microreplicated structures help manufacturers deliver precision and control for unique requirements
- Combine with 3M™ CMP Pad Conditioner Coatings for additional protection from metal contamination
- Compatible with all 3M™ CMP Pad Conditioner Coatings with minimal process changes
- Diamond coated ceramic material can be manufactured to key specifications for maximum yield and pad life
- Metal-free cutting surface for advanced node processes sensitive to metal contamination
- Outstanding disk-to-disk consistency for predictive performance
Abrasive Material CVD coated ceramic Application - Advanced Node (Memory & Logic)
- Wafer Manufacturing
- CMP
Carrier Diameter (Imperial) 4.25 in Carrier Diameter (Metric) 107.95 mm Carrier Material 304 Stainless Steel CMP Process All Diamond Size 0.0 Product Series T102-5 Product Type Pad Conditioner ECCN EAR99 Harmonized Tariff Schedule Nbr 6805301000 Sales unit EA SAP Shelf Life In Days 730 Target Warehouse Location Lead Time 20 SAP External Material Group 31191500 Base (B) - Billing Unit EA Base (B) - Customary Cubic Dimension 107.77128 IN3 Base (B) - Customary Gross Weight 1.02367 LB Base (B) - Customary Net Weight 1.02367 LB Base (B) - Metric Net Weight 0.46425 KG Base (B) - Metric Cubic Dimension 1766.048 CCM Base (B) - Previous Packaging Level Quantity 0.00 Base (B) - Item Quantity 1 Base (B) - Total Unit Quantity 0.00 Base (B) - Unit EA Base (B) - Pallet Layer Quantity 0.00 Base (B) - Shipping Container Per Layer Quantity 0 Consumer (2) - Item Quantity 0 Inner (3) - Item Quantity 0 Shipper (6) - Previous Packaging Level Quantity 1.00 Shipper (6) - Item Quantity 0 Shipper (6) - Total Unit Quantity 1.00 Pallet (8) - Previous Packaging Level Quantity 0.00 Pallet (8) - Previous Packaging Level Unit LOOS Pallet (8) - Item Quantity 0 Pallet (8) - Total Unit Quantity 0.00 Pallet (8) - Pallet Layer Quantity 0.00 Pallet (8) - Shipping Container Per Layer Quantity 0